Thin film electrodes and thin film capacitors

Synthesis and electrochemical properties of nanoporous CrN thin film ...

An electrochemical workstation (AMETEK, 1470E) with a conventional three-electrode setup (working electrodes: the coatings presented here; reference electrode: Ag/AgCl [KCl saturated]; counter electrode: Pt plate), was used to evaluate the electrochemical properties of as-deposited and etched CrN-Ni thin films in a 0.5 M H 2 …

Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O3 thin‐film capacitors ...

See, for example, Proceedings of the 4th International Symposium on Integrated Ferroelectrics, edited by C. A. Paz de Araujo, University of Colorado, Monterey, CA, March 1992; Mater.

Atomic layer deposition of high-k and metal thin films for high ...

Deposition of electrode thin films using ALD3.1. Deposition of TiN thin films. To fabricate DRAM capacitors, a TiN thin film grown by a TiCl 4 /NH 3-based ALD process is used for the metal electrode deposition [2, 14]. TiCl 4 is a liquid precursor that enables a simple handling in the TiN ALD process.

Domain Dynamics and Resistive Switching in Ferroelectric Al1–xScxN Thin ...

In this paper, using a combination of pulse testing measurements and piezoresponse force microscopy (PFM), an investigation of the polarization reversal behavior and the accompanying resistive switching in the Al 0.72 Sc 0.28 N thin film capacitors is reported. The obtained results reveal a transition from the nucleation-limited switching …

The Effect of Deposition Temperature on TiN Thin Films for the ...

The TiN thin film is considered a promising electrode layer for 3D capacitors. In this study, TiN thin films were prepared on Si substrates using atomic layer deposition (ALD) at various temperatures from 375 °C to 475 °C. The crystallization behavior, microstructure, and conductance properties of those TiN thin films were …

(PDF) Effect of Top Electrodes on Photovoltaic Properties of ...

We investigated capacitors based on polycrystalline narrow-band-gap BiFeO(3) (BFO) thin films with different top electrodes. The photovoltaic response for the capacitor with a Sn-doped In(2)O(3 ...

Ultra-high areal capacitance and high rate capability RuO2 thin …

Clearly, the technology developed in this study leads to very high capacitance values (∼ 4.5 Fcm −2) compared to literature data on 2D thin and thick film …

Toward Advanced High

In this regard, technological advances in the fabrication of capacitors are of great importance; accordingly, the materials and processing of high-k thin films require developmental innovations. Besides, it is necessary to develop electrode materials that optimize the function of high-k thin films. In this review, recent advances in achieving ...

Asymmetric electrochemical capacitor microdevice designed with …

The CV of VN thin film electrode shows a rectangular shape envelope on which are superimposed two broad oxidation and reduction peaks (Fig. 1) arge storage mechanism has been proposed in different papers [14] and is related to reversible surface redox reactions. The capacitance, calculated from the integrated area of the cathodic …

Cobalt-based metal–organic framework (Co-MOF) thin films with …

One of the advanced forms of energy storage is the supercapacitor, which offers many advantages including high power density and fast charging and discharging rates. Metal–organic frameworks (MOFs), which are potential supercapacitor electrode materials, have been intensively researched. In this study, we used a simple and …

Magnetron sputtered TiN thin films toward enhanced performance ...

Supercapacitors as a new type of energy storage devices bridging the gap between conventional capacitors and batteries have aroused widespread concern. Herein, binder-free titanium nitride (TiN) thin film electrodes for supercapacitors prepared by reactive magnetron sputtering technology are reported. The effect of N2 content on the …

Self-assembled three-dimensional and compressible interdigitated thin ...

It is challenging to construct three-dimensional thin-film energy-storage devices. Here the authors present supercapacitors and batteries based on layer-by-layer self-assembly of interdigitated ...

Nanostructured carbon-based electrodes: bridging the gap between thin ...

The fast evolution of portable electronic devices and micro-electro-mechanical systems (MEMS) requires multi-functional microscale energy sources that have high power, high energy, long cycle life, and the adaptability to various substrates. Nanostructured thin-film lithium-ion batteries and electrochemical capacitors (ECs) are …

Self-assembled three-dimensional and compressible …

It is challenging to construct three-dimensional thin-film energy-storage devices. Here the authors present supercapacitors and …

Multilayer thin film capacitors by selective etching of Pt and Ru ...

However, many of the recently reported multilayer capacitor thin film fabrication methods are disadvantageous in that the electrode layers are connected through a series of vias [6], [7]. Therefore, the fabrication process is very cumbersome and adds a significant number of processing steps, increasing the probability of device failure and the ...

Effects of electrodes on antiferroelectricity and fatigue endurance …

The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf 0.2 Zr 0.8 O 2 thin films has been studied by a metal–antiferroelectric–metal capacitor structure using TiN and W as electrodes. The W|Hf 0.2 Zr 0.8 O 2 |W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the …

What is a Film Capacitor and Different Types of Film Capacitors …

A Thin Film Capacitor is nothing but bipolar capacitors with plastic films as their dielectric. These films are either metalized or just placed in layers to form out a roll or a candy-like the rectangular shape. ... to burn away any existing defects on the surface of the electrodes. Since the capacitors can get easily affected by moisture, the ...

Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors …

Atomic layer deposition (ALD) is a key technique that enables the growth of functional thin films for DRAM capacitors; thus, recent advances in the deposition of high‐k and electrode thin films ...

Synthesis and performance of TiN film electrode for …

Transition metal nitrides are recognized as an important electrode material for supercapacitors owing to their high corrosion resistance, good chemical and electrochemical stability, and electronic structure similar to transition metals. Here, we have successfully prepared the TiN thin films for supercapacitor electrodes without binder by …

Thin Film Multilayer Capacitors | SpringerLink

Thin film capacitors of ~1,000 nm thickness have recently been studied in terms of film behavior for specific device application such as piezoelectric thin films for microelectromechanical systems ... Srinivasan S (2005) Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications ...

Frequency and temperature-dependent dielectric properties of …

Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 °C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20–200 °C.At about 10 kHz, the grain effect is …

Effect of metal electrodes on the steady-state leakage current in …

Thin Pb(Zr 0.52 Ti 0.48)O 3 film with the thickness of 1067 nm was deposited on Si-SiO 2 (300 nm) –TiO 2 (10 nm)—Pt (160 nm) substrate by chemical solution deposition with the use of preparation technique described in Ref. [].To create the upper electrode, 50 nm thick Au and Ir films were deposited by magnetron sputtering …

Film Capacitor | Capacitor Types | Capacitor Guide

Film Capacitor | Capacitor Types - EEPower

Ternary nanocomposite SWNT/WO3/PANI thin film electrodes for ...

In this work, thin film supercapacitor electrodes made up of binder-free single walled carbon nanotube (SWNT) thin films were deposited onto glass substrates by vacuum filtration followed by stamping method. ... Electrochemical double layer capacitors (EDLCs) store charge electrostatically in double layers, whereas pseudocapacitors store ...

Dead layer effect and its elimination in ferroelectric thin film with ...

Chang et al. [21] demonstrated that an inherent dead layer appears in the SrTiO 3 single crystal thin film capacitor with Pt electrodes, while it does not exist in an analogous structure involving BaTiO 3. Therefore, there seems to be a conflict between the theoretical and experimental work. In specific, the experimental results from different ...

Processing of thin-film electrode based supercapacitors: Progress ...

A thin-film electrode (TFEs) is one of the emerging technologies utilized in thin film supercapacitors (SCs). The thickness of the active materials loading ranges from a few nanometer to ...

Processing of thin-film electrode based supercapacitors: Progress …

The specific capacitance of 431 F/g at 2 mV/s scan rate was achieved for Ag thin film electrode produced at 350 W forward power, demonstrating its promising …

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